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CVD Ald Atomic Layer Deposition System for Powder Coating Plating
CVD Ald Atomic Layer Deposition System for Powder Coating Plating
CVD Ald Atomic Layer Deposition System for Powder Coating Plating
CVD Ald Atomic Layer Deposition System for Powder Coating Plating
CVD Ald Atomic Layer Deposition System for Powder Coating Plating
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CVD Ald Atomic Layer Deposition System for Powder Coating Plating
CVD Ald Atomic Layer Deposition System for Powder Coating Plating
CVD Ald Atomic Layer Deposition System for Powder Coating Plating
CVD Ald Atomic Layer Deposition System for Powder Coating Plating
CVD Ald Atomic Layer Deposition System for Powder Coating Plating

CVD Ald Atomic Layer Deposition System for Powder Coating Plating

Customization: Available
After-sales Service: Onlin
Warranty: 1
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Product Description

Basic Information
Model NO.
CY-ALD
Type
Coating Production Line
Coating
Vacuum Coating
Certification
CE
Condition
New
Wafer Dimension
8 Inch and Below
Wafer Temp.
Rt-400c, Precision +-0.1c
ALD Valve
Swagelok Ald Swift Valve
Background Vacuum
<5*10-3torr
Gas Carrier
N2 or Ar
Product Description

CVD ALD Atomic Layer Deposition System

The Thermal Atomic Layer Deposition System is a single-wafer deposition system specially designed for scientific research and small-scale experiments of industrialization. It is widely used in the fields of micro-electronic, nano material, optical film, solar battery etc.

⚙️
Product Benefits
Advanced software controlling system integrating technological formulation, parameter setting, popedom setting, interlocking alarming and state supervisory control.

Compatible ALD Films

  • Elementary substance: Co, Cu, Ta, Ti, W, Ge, Pt, Ru, Ni, Fe…
  • Nitride: TiN, SiN, AlN, TaN, ZrN, HfN, WN …
  • Oxide: TiO2, HfO2, SiO2, ZnO, ZrO2, Al2O3, La2O3, SnO2…
  • Others: GaAs, AlP, InP, GaP, InAs, LaHfxOy, SrTiO3, SrTaO6…

Application Fields

  • High-k gate oxides & Storage capacitor dielectrics
  • High aspect ratio diffusion barriers for Cu interconnects
  • Pinhole-free passivation layers for OLEDs and polymers
  • Highly conformal coatings for MEMS applications
  • Coating of nanoporous structures & Doping of special fiber
  • Solar battery, Flat plate display, and Optical thin-films
Technical Parameters
Wafer Dimension8 inch and below
Wafer temperatureRT-400ºC, Controlling precision ±0.1ºC
Number of precursorThree precursor lines, optional more lines
Temperature of precursor linesRT-200ºC, Controlling precision ±0.1ºC
Temperature of source bottlesRT-200ºC, Controlling precision ±0.1ºC
ALD ValveSwagelok ALD swift valve
Background vacuum<5*10⁻³ Torr
Gas carrier systemN₂ or Ar
Growing modeConsecutive or interval deposition mode
Controlling systemPLC plus touch screen or display
Power supply50-60Hz, 220V/20A AC
Deposition HeterogeneityHeterogeneity < ±1%
Dimension of the instrument600mm x 600mm x 1100mm
Detailed Photos
ALD System View 1
ALD System View 2
ALD System View 3
ALD System View 4
ALD System View 5
ALD System View 6
ALD Details
Frequently Asked Questions
Are you a manufacturer or a trading company?
We are professional laboratory instrument manufacturers with our own design team and factory, ensuring high quality and optimal pricing through mature technical experience.
What is the after-sales service system for your products?
The product warranty period is 12 months with lifetime maintenance provided. Professional pre-sales and after-sales departments are available to resolve technical issues within 24 hours.
How long is the delivery time for standard and customized instruments?
In-stock goods typically ship within 5-10 days. Customized instruments usually take 30-60 days depending on the specific technical requirements.
How do you handle different power supplies and plug requirements?
We can supply transformers and plugs configured specifically to your local requirements and national power standards.
What are the available payment and packaging methods?
We accept T/T, L/C, D/P, and Trade Guarantee. Goods are packed in standard export fumigation wooden boxes and can be delivered via express, air, or sea.

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